|
KMID : 0385520110240020105
|
|
Analytical Science & Technology
2011 Volume.24 No. 2 p.105 ~ p.112
|
|
|
Synthesis and property analysis of hydropolysilanes for amorphous and polycrystalline silicon
|
|
Ahn Sun-Ah
Lee Sung-Hwan
Song Young-Sang
Lee Gyu-Hwan
|
|
|
Abstract
|
|
|
|
Syntheses and property analysis of hydropolysilanes were studied. Those hydropolysilanes can be utilized as precursors for amorphous silicon and polycrystallline silicon for the purpose of the solar cell and the thin film transister for the next generation"s semiconductors. Most important characteristics of this study are to find optimized conditions for the synthesis and property analysis of soluble hydropolysilanes. Also the possibility of pyrolytic conversion to amorphous and polycrystalline silicon was investigated.
|
|
|
KEYWORD
|
|
|
chloropolysilanes(CPS), hydropolysilanes(HPS), property analysis of hydropolysilanes, amorphous silicon(a-Si), polycrystalline silicon(p-Si)
|
|
|
FullTexts / Linksout information
|
|
|
|
|
|
Listed journal information
|
|
|